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Logistics-Semiconductor FOUP Stocker
Key Features
Stocker for loading semiconductor wafer FOUP. Configuration of one Rack Master and one Shelfframe, Manual Port.
No. | Item | Spec |
---|---|---|
1 | Facility Size(L X D X H) | 4,500mm X 1,500mm X 4,500mm |
2 | Object | 200mm, 300mm FOUP |
3 | Carrier Weight | 10Kg |